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The purpose of this Document is to standardize requirements for hexamethyldisilazane used in the semiconductor industry and testing procedures to support those standards
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SEMI D31 — Definition of Measurement Index (Semu) for Luminance Mura in FPD Image Quality Inspection
本文書の範囲は半導体産業で使用される25%テトラメチル水酸化アンモニウムの提案された不純物限度の一覧作成である。
This marking symbol is marked in a manner and location to avoid affecting the user patterning process
C00348 - SEMI C3.48 - Standard for Nitrogen (N2), Bulk Liquid, 99.9994% Quality Revision:SEMI C3.48-0200 (Withdrawn 0303) - Replaced The purpose of this DocumentThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on October 19, 1999. Available at www. semi. org in February 2000; originally published in 1993; previously published in 1996. NOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59. Nitrogen is an odorless, tasteless, diatomic gas
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