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SEMI E15 — Specification for 300 mm Tool Load Port
この文書の目的は，半導体製造装置の中で静電気電荷および電界に起因した生産性への悪影響を最小にすることである。本文書は，半導体製造に使われる装置が静電気的な両立性を確立するためのガイドである。半導体工場全体の静電気的な両立性は，SEMI E129に述べている。
but these are outside the scope of this Test Method
equipment concept etc
SEMI ME1392 — Guide for Angle Resolved Optical Scatter Measurements on Specular or Diffuse Surfaces
F05100 - SEMI F51 - Guide for Elastometric Sealing Technology StdVol-3D-IC SEMI E15 — Specification forThis Standard was technically approved by the Facilities Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 28, 2017. Available at www. semiviews. org and www. semi. org in September 2017; originally published February 2000; previously published November 2015. O rings were originally developed for industrial markets and much later for aerospace. Current industry standards do not
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