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This places a burden on the capabilities of transport modules to move wafers to and from various modules in a cluster tool
diffused or deposited films is an important materials acceptance and process control parameter
SEMI G32 — Guideline for Unencapsulated Thermal Test Chip
SEMI MF1530-0707 (technical revision)
SEMI M43 — Guide for Reporting Wafer Nanotopography
E00109 - SEMI E1.9 - Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers StdPbc-0115 This places a burden onNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the cassettes used to transport and store 300 mm wafers in an IC manufacturing facility. This includes both manual and auto transport use as well as high speed extraction of the wafers in processing
US$ 4680.00
US$ 845.00