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PV10200 - SEMI PV102 - Guide for Tube PECVD Graphite Boat Materials for Solar Cell Production Revision:SEMI PV102-0125 - Current SEMI MF42-0316 (Reapproved 0921)

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Description

SEMI MF42-0316 (Reapproved 0921)

The purpose of the Object Services Standard (OSS) is to provide general terminology

the integrity of these parts is very important for the performance of EFFU

SEMI G2-82 (technical revision)

and/or to meet ergonomic requirements for manually loaded equipment

PV10200 - SEMI PV102 - Guide for Tube PECVD Graphite Boat Materials for Solar Cell Production Revision:SEMI PV102-0125 - Current SEMI MF42-0316 (Reapproved 0921)1 Purpose 1. 1 This Standard develops material guidelines for tube plasma enhanced chemical vapor deposition (PECVD) graphite boats, providing guidance and material performance testing for material manufacturers, processing manufacturers, and battery cell manufacturers. The high reliability of graphite boats is the goal to meet the needs of tubular PECVD process. 2 Scope 2. 1 This Standard provides recommendations for various property values and

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