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D01100 - SEMI D11 - Specification for Flat Panel Display Glass Substrate Cassettes StdVol-Flat Panel Display The use of CP for

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Description

The use of CP for measuring the roughness of polymer surfaces is outlined in this Test Method

SEMI D61-1110 (first published)

The use of AFM for measuring the roughness of polymer surfaces is outlined in this test method

SEMI C35-0699 (first published - replaces SEMI C1

others on back-surface illumination

D01100 - SEMI D11 - Specification for Flat Panel Display Glass Substrate Cassettes StdVol-Flat Panel Display The use of CP forThis Standard was technically approved by the Flat Panel Display Factory Automation Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2009. Available at www. semi. org in July 2009; originally published in 1995; previously published July 2003. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met.

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