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E08400 - SEMI E84 - 캐리어 핸드오프 병렬 I/O 인터페이스 강화 사양 Lang-Chinese (Traditional) and material acceptance purposes

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and material acceptance purposes

本文書は,溶剤に原料を溶解した液を含む「液体原料」(定義を参照)を保持するために使用される,金属製(例えばステンレス鋼)キャニスターに適用される。また,供給システムのin-situクリーニングに使用される溶剤用の容器にも適用される。

The Guide provides criteria for selection of instruments for determining the resistivity of silicon resistivity reference materials

This will facilitate comparison of test results among worldwide laboratories used for monitoring or qualifying PV polysilicon and other PV silicon materials

SEMI M45 — Provisional Specification for 300 mm Shipping System

E08400 - SEMI E84 - 캐리어 핸드오프 병렬 I/O 인터페이스 강화 사양 Lang-Chinese (Traditional) and material acceptance purposesGlobal Physical Interfaces & Carriers Committee , 2009 9 4 Global Audits and Reviews Subcommittee . 1999 6 , 2007 11 . 2009 10 www. semi. org . , FOUP (open cassettes) (carrier) (AMHS) . AMHS (PI O) (control) (carrier) (handoff) ( ) . (carrier) SEMI E23 I O . (handoff), (handoff) , . (, AGV, RGV OHT AMHS ) (, ; ) (handoff) , (interbay) AMHS (, OHS ) (, OHS ) . AMHS (handoff) (carrier) I O . Figure 1 2 AHMS . (carrier) (handoff) I O : ( 6. 1) (carrier)

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