E04600 - SEMI E46 - Test Method for the Determination of Organic Contamination from Minienvironments Using Ion Mobility Spectrometry (IMS) StdPbc-0319 This specification defines lead finishes

This specification defines lead finishes for plastic packages (e

1) for the measurement of contamination on the wafer surface

高性能なデジタルおよびアナログのマイクロ電子デバイスや回路を製作するには高い電気抵抗率と電子ドリフト移動度の基板が必要である。半絶縁性n型のガリウムヒ素（以降SI GaAsと記す）は，そのような用途に望ましい基板として世界中で認められてきた。

SEMI E116 — Provisional Specification for Equipment Performance Tracking

controlled

E04600 - SEMI E46 - Test Method for the Determination of Organic Contamination from Minienvironments Using Ion Mobility Spectrometry (IMS) StdPbc-0319 This specification defines lead finishesNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Test Method is to provide an analytical procedureion mobility spectrometry (IMS)for the determination of organic contamination from minienvironments which has the capability of testing their