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approximately) and larger in thickness
この文書の適用範囲は，測定に使用する方法とすべての設備表面に存在する静電気電荷の最大推奨レベルに関するガイダンスに限定される｡
(表 R1-2)
This Standard includes the measuring
but are not limited to:
T01600 - SEMI T16 - 極紫外線マスク自動識別用データマトリクス記号法適用の仕様 StdTpc-Chemical & Gas Testing approximately) and larger in thicknessNotice: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI global Traceability Committee2006516global Audits and Reviews Subcommittee20066www. semi. org200511 EUV SEMI P37SEMI P386 6 Referenced SEMI Standards SEMI P37 Specification for Extreme Ultraviolet Lithography Mask Substrates SEMI P38